Browsing Наукові праці by Author "Ruzalkin, V."
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Discharge characteristics of the magnetron system for sputtering, deposition, and nanotechnology applications
Breus, A.; Serdiuk, A.; Ruzalkin, V.; Baranov, O. (ХАІ, 2020)Magnetron sputtering is known for years as a powerful tool for coating deposition of cutting tools and machine parts. However the experimental measurements of the magnetron discharge parameters are still necessary to provide ...